JPH0274162U - - Google Patents
Info
- Publication number
- JPH0274162U JPH0274162U JP15194088U JP15194088U JPH0274162U JP H0274162 U JPH0274162 U JP H0274162U JP 15194088 U JP15194088 U JP 15194088U JP 15194088 U JP15194088 U JP 15194088U JP H0274162 U JPH0274162 U JP H0274162U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- friction roller
- backup
- separate
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000004381 surface treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15194088U JPH0645325Y2 (ja) | 1988-11-22 | 1988-11-22 | 基板の表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15194088U JPH0645325Y2 (ja) | 1988-11-22 | 1988-11-22 | 基板の表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0274162U true JPH0274162U (en]) | 1990-06-06 |
| JPH0645325Y2 JPH0645325Y2 (ja) | 1994-11-24 |
Family
ID=31426430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15194088U Expired - Lifetime JPH0645325Y2 (ja) | 1988-11-22 | 1988-11-22 | 基板の表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645325Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009018410A (ja) * | 2007-06-15 | 2009-01-29 | Ishii Hyoki Corp | 研磨装置及び研磨方法 |
-
1988
- 1988-11-22 JP JP15194088U patent/JPH0645325Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009018410A (ja) * | 2007-06-15 | 2009-01-29 | Ishii Hyoki Corp | 研磨装置及び研磨方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0645325Y2 (ja) | 1994-11-24 |
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